METHOD OF TREATING JOINT IN CERAMIC ASSEMBLY

摘要

A method of forming an improved sealed joint between two or more shaped ceramic structures includes providing at least first and second ceramic structures joined together by a joint comprising one or more of silicon, a silicon alloy and a silicon compound, the joint including an exposed portion interior of the joined structures, then converting at least a portion of the one or more of silicon, a silicon alloy, and a silicon compound of the joint to silicon nitride and/or silicon carbide, desirably at least at an interior exposed portion of the joint, so as to provide increased chemical resistance for the joint when aggressive chemicals are used within device formed from the sealed-together ceramic structures. The ceramic structures desirably comprise silicon carbide.