| 摘要 |
THE INVENTION PROVIDES COMPOSITIONS AND METHODS FOR PLANARIZING OR POLISHING A SURFACE. ONE COMPOSITION COMPRISES ABOUT 0.01 WT. % TO ABOUT 20 WT. % ?-ALUMINA PARTICLES, WHEREIN THE ?-ALUMINA PARTICLES HAVE AN AVERAGE DIAMETER OF 200 NM OR LESS, AND 80% OF THE ?-ALUMINA PARTICLES HAVE A DIAMETER OF ABOUT 500 NM OR LESS, AN ORGANIC ACID, A CORROSION INHIBITOR, AND WATER. ANOTHER COMPOSITION COMPRISES ?-ALUMINA PARTICLES, AN ORGANIC ACID, DUAL CORROSION INHIBITORS OF TRIAZOLE AND BENZOTRIAZOLE, WHEREIN THE WT. % RATIO OF THE TRIAZOLE TO BENZOTRIAZOLE IS ABOUT 0.1 TO ABOUT 4.8, AND WATER. |
