| 摘要 |
A METHOD AND APPARATUS OF MANUFACTURING A MAGNETIC RECORDING MEDIUM ARE PROVIDED, IN WHICH EVEN IF THE MULTIPLE-SUBSTRATE-PROCESSING IS PERFORMED FOR IMPROVING PRODUCTIVITY, REDUCTION IN PROPERTY OR DETERIORATION IN QUALITY MAY NOT BE INDUCED. FOUR SMALL-DIAMETER CHEMICAL-TEMPERED GLASS SUBSTRATES ARE ATTACHED TO SMALL-DIAMETER SPUTTER CARRIER (10) FOR SPECIAL SIZE OF 8.9 CM (3.5 INCHES). SEED LAYERS (2) ARE DEPOSITED ON THE FOUR SMALL-DIAMETER CHEMICAL-TEMPERED GLASS SUBSTRATES, THEN EACH SUBSTRATE IS ROTATED TO SHIFT A POSITION FOR SUPPORTING THE SUBSTRATE BY A MOVABLE CLAW (11) FOR HOLDING A SMALL-DIAMETER SPUTTER CARRIER SUBSTRATE, SO THAT THE SEED LAYER IS ELECTRICALLY CONDUCTED TO THE MOVABLE CLAW. A BIAS VOLTAGE IS APPLIED VIA THE MOVABLE CLAW FOR SUBSEQUENT DEPOSITION. |
