| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an extreme ultraviolent exposure mask dustproof device and an extreme ultraviolent exposure device which can detect breakage easily. <P>SOLUTION: An extreme ultraviolent exposure mask dustproof device 1 comprises a dustproof member 2 for an extreme ultraviolent exposure mask, a signal assignment unit 3 which assigns a prescribed signal to the dustproof member 2, and an analysis unit 4 which analyzes a signal propagating through the dustproof member 2. This composition makes it possible to check the presence of breakage in the dustproof member 2 beforehand. Because the manner in which a signal propagates differs depending on whether there is breakage in the dustproof member 2, once a signal propagating through when there is no breakage is analyzed in advance, it is possible to confirm the presence of breakage by comparing it with the result of analysis made by the analysis unit 4 in actual inspection. <P>COPYRIGHT: (C)2013,JPO&INPIT |
