RETICLE SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT SYSTEMS

摘要

RETICLE SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT SYSTEMSA reticle system that includes: providing a reticle system; and assigning two or more of an image pattern onto the reticle system to form one or more layers of an integrated circuit5 system by grouping and pairing each of the image pattern onto the reticle system according to a multi-layer reticle grouping/pairing flow.Fig. 7