发明名称 Method and system for providing an NFT using a sacrificial NFT structure
摘要 A method and system provides a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming a sacrificial NFT structure having a shape a location corresponding to the NFT. A dielectric layer is deposited. A portion of the dielectric layer resides on the sacrificial NFT structure. At least this portion of the dielectric layer on the sacrificial structure is removed. The sacrificial NFT structure is removed, exposing an NFT trench in the dielectric layer. At least one conductive layer for the NFT is deposited. A first portion of the conductive layer(s) reside in the NFT trench. A second portion of the conductive layer(s) external to the NFT trench is removed to form the NFT.
申请公布号 US8491801(B1) 申请公布日期 2013.07.23
申请号 US201113291702 申请日期 2011.11.08
申请人 TANNER SHAWN M.;HU YUFENG;TRAN UT;WANG ZHONGYAN;WESTERN DIGITAL (FREMONT), LLC 发明人 TANNER SHAWN M.;HU YUFENG;TRAN UT;WANG ZHONGYAN
分类号 B44C1/22;G11B5/127 主分类号 B44C1/22
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