| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control device which is small in size and short in height, and can further increase a discharge flow rate of the fluid control device in its unloaded condition independently of a capacity of a pump.SOLUTION: A fluid control device 100 is equipped with a piezoelectric pump 15 and a cover case 101. The cover case 101 is attached to an upper surface 14 of an outer case 17 of the piezoelectric pump 15. By this, a ventilation passage 105 for introducing air from an outside of the fluid control device 100 is formed between the cover case 101 and the outer case 17 of the piezoelectric pump 15. The ventilation passage 105 includes a ventilation passage 105A formed between the cover case 101 and an upper surface 14 of the outer case 17 which is parallel to a vibration plate 39 and is on the opposite side to the vibration plate 39. In the cover case 101, an outlet 102 is formed in a position opposite to an exhaust port 24 of the piezoelectric pump 15 via the ventilation passage 105A. The ventilation passage 105A is perpendicular to the central axis passing through the center of the exhaust port 24 and the center of the outlet 102. |
