| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive oxide less in the amount of rare metal used and suitable for a sputtering target, and a method for producing the conductive oxide.SOLUTION: A conductive oxide of the present invention includes a crystalline substance: InAlZnO(where, 0<m<1, 0<q<1 and 0≤p≤3m/2+q are satisfied) and a crystalline substance: AlZnO. When an atomic concentration ratio of Zn is defined to be 1, an atomic concentration ratio of Al is preferably 1.1 or less, and is more preferably 0.9 or more. |
