| 摘要 |
PROBLEM TO BE SOLVED: To provide a lattice type X-ray phase imaging device capable of detecting a periodic pattern having a shorter period than that in conventional X-ray imaging devices.SOLUTION: An X-ray imaging device for imaging an object to be inspected 4, includes: a lattice 3 for forming a periodic pattern using X-rays from an X-ray source 1; and a detector 5 for detecting the periodic pattern. When an angle formed between a first direction that is a periodic direction of the periodic pattern in a plane perpendicular to an optical axis 210 of X-rays and a straight line parallel to an X-ray reception surface of the detector 5 in the same plane is &thetas;and a diagonal incident angle of X-rays with respect to the X-ray reception surface is &thetas;, the following expression is satisfied. An angle formed between the surface of the lattice 3 and the optical axis 210 of X-ray is 45° or more and 90° or less. |
