发明名称 OPTICAL BENCH ON SUBSTRATE
摘要 An optical bench on substrate includes a substrate and a trench formed inside the substrate and having a sloping side. A reflector layer is formed over the sloping side. An optical component is mounted over the substrate. The reflector layer is configured to reflect an electromagnetic wave to or from the optical component.
申请公布号 US2013223789(A1) 申请公布日期 2013.08.29
申请号 US201213403566 申请日期 2012.02.23
申请人 LEE WAN-YU;TSENG CHUN-HAO;CHEN HAI-CHING;BAO TIEN-I;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LEE WAN-YU;TSENG CHUN-HAO;CHEN HAI-CHING;BAO TIEN-I
分类号 G02B6/12;H01L21/02 主分类号 G02B6/12
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