Filtering apparatus for Manufacturing Single Crystal Ingot and Single Crystal Ingot Grower including the same

摘要

PURPOSE: A filtering device for a single crystal growing device and the single crystal growing device including the filtering device are provided to prevent filter inside etching caused by oxide as the inside of a filter is formed with an acid-resistant material. CONSTITUTION: A body unit(310) includes a filter for air flowing from a chamber. A cover unit(330) is placed on an upper side of the body unit. The body unit includes a high temperature corrosion resistance material. A combining device(340) is placed on a lower part of the filter.