| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device 111 which enables a barrier 101 to be easily attached or detached and also enables a sample 6 to be disposed under a vacuum condition and a high pressure condition.SOLUTION: A charged particle beam device includes: a lens barrel 3 holding a charged particle source 110 and electronic optical systems 1, 2, 7; a first housing 4 connected with the lens barrel 3 and emitting a charged particle beam therein; a second housing 100 recessed from an opening 4a of the first housing 4 to the inner side of the first housing 4; a first barrier 10 separating a space in the lens barrel 3 from a space in the first housing 4 and allowing the charged particle beam to transmit; a second barrier 101 separating an interior space from an exterior space of a recess 100a of the second housing 100 and allowing the charged particle beam to transmit; and a tube 23 that is connected to a third housing 22 housing the charged particle source 110 and penetrating through the electronic optical systems 1, 2, 7. The first barrier 10 is attached to the tube 23, and the tube 23 and the third housing 22 may be attached to or detached from the lens barrel 3 in a direction of an optical axis 30. A space 105 enclosed by the first housing 4 and the second housing 100 is decompressed, and the charged particle beam is radiated to a sample 6 disposed in the recess 100a. |
