| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro element capable of improving both driving efficiency of a vibration arm and detection sensitivity of an angular velocity.SOLUTION: A gyro element 100 includes: a base part 190; driving vibration arms 101, 102; detecting vibration arms 103, 104; driving piezoelectric elements 110, 120, 130, 140 provided with the driving vibration arms 101, 102; and detecting piezoelectric elements 150, 160 provided with the detecting vibration arms 103, 104. The driving piezoelectric elements (such as 110) includes driving piezoelectric films (such as 112) between lower electrodes (such as 111) and upper electrodes (such as 113), the detecting piezoelectric element 150, 160 includes detecting piezoelectric films 152, 162 between lower electrodes 151, 161 and upper electrode 153, 163. A piezoelectric constant of the driving piezoelectric film (such as 112) is larger than a piezoelectric constant of the detecting piezoelectric films 152, 162, and a dielectric constant of the detecting piezoelectric films 152, 162 is smaller than a dielectric constant of the driving piezoelectric films (such as 112). |
