PURPOSE: A stage apparatus is provided to prevent deformation by accurately controlling the rotational position of a &thgr; table. CONSTITUTION: An X-axis stage moves in a horizontal direction. A Θ table (31) rotates on the X-axis stage. A rotation bearing (34) supports the &thgr; table. A horizontal driving device drives the X-axis stage in the horizontal direction. A pair of linear sensors (38) detects the displacement of the &thgr; table.
