MEASURING SYSTEM FOR MEASURING AN IMAGING QUALITY OF AN EUV LENS

摘要

A measuring system (10) for measuring an imaging quality of an EUV lens (30) comprises: a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by means of a lens, a detector (14) for recording an image stack comprising a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) which is configured to determine the imaging quality of the lens from the image stack.