MANUFACTURING METHOD OF VIBRATION PIECE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibration piece capable of improving accuracy of a position of a metal film pattern for adjustment formed on the vibration piece.SOLUTION: A manufacturing method of a vibration piece comprises the steps of: depositing a metal film 11 on a substrate 10A; depositing a resist film 21A on the metal film 11; patterning the resist film 21A, removing the metal film 11 so as to leave a part of the metal film 11 not overlapping with the resist film 21A patterned and forming a metal film pattern 18 for adjustment that is a portion of the metal film 11 overlapping with the resist film 21A and a metal film 17a for forming an electrode that is a portion of the metal film 11 left; depositing a resist film 21B on the metal film 17a for forming an electrode; patterning the resist film 21B, removing a portion of the metal film 17a for forming an electrode not overlapping with the resist film 21B patterned and forming a metal film pattern 17 for an electrode; and removing the resist film 21B patterned.