| 摘要 |
PROBLEM TO BE SOLVED: To enhance collection performance of particles with a low pressure loss.SOLUTION: There is provided an exhaust system 66 provided in an apparatus, which comprises: an exhaust duct 68 which is a channel of air when the air is discharged from the inside to the outside of the apparatus; blowing means 72 which is provided inside the exhaust duct 68 and suctions the air in the exhaust duct 68 from an axial direction to send the air in the axial direction; filter means 74 which is disposed so as to contact with a blow port and passes air from the blowing means 72 and collects particles included in the air; and a circulation flow path 76 for guiding a part of the air passed through the filter means 74 to the upstream side of the blowing means 72. The exhaust duct 68 discharges the remainder of the air passed through the filter means 74 to the outside of the apparatus. |
