| 摘要 |
The present invention relates to an optical inspection device, wherein visual inspection is performed on an inspection sheet which is formed by easily deformable material in a precisely fixed state, thereby improving inspection speed and realizing more stable and more accurate inspection. The optical inspection device comprises the following components: an inspection object stage which is provided with a placement tank that dents downwards along the edge on the upper surface, wherein a flow path is formed through the placement tank and the lower surface, furthermore the inspection object stage is made of light-penetrable material for loading the inspection sheet; a fixed frame which supports the side surface or the lower surface of the inspection objective stage; an absorption panel which is made of porous ceramic and is inserted into the placement tank of the inspection object stage for fixation; a vacuum assembly which absorbs the inspection sheet on the absorption panel through applying a vacuum pressure on the flow path; a backlight unit which irradiates light to the inspection sheet on the inspection object stage from the part below the inspection object stage; and a photographing unit which is configured above the inspection object stage and acquires the image of the inspection sheet that is loaded on the inspection object stage. |
