发明名称 Semiconductor device manufacturing method
摘要 In an MIS-type GaN-FET, a base layer made of a conductive nitride including no oxygen, here, TaN, is provided on a surface layer as a nitride semiconductor layer to cover at least an area of a lower face of a gate insulation film made of Ta2O5 under a gate electrode.
申请公布号 US8603903(B2) 申请公布日期 2013.12.10
申请号 US201213443228 申请日期 2012.04.10
申请人 KANAMURA MASAHITO;KIKKAWA TOSHIHIDE;FUJITSU LIMITED 发明人 KANAMURA MASAHITO;KIKKAWA TOSHIHIDE
分类号 H01L21/28 主分类号 H01L21/28
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