发明名称 |
NEUTRAL LAYER POLYMER COMPOSITION FOR DIRECTED SELF ASSEMBLY AND PROCESSES THEREOF |
摘要 |
The present invention relates to a novel polymeric composition comprising a novel polymer having two or more repeat units and a terminus having the structure (1): wherein R1 represents a C1-C20 substituted or unsubstituted alkyl group, w is a number from 1-8, X is oxygen (O) or nitrogen (N), and Rd is a reactive group. The invention also relates to a process for forming a pattern using the novel polymeric composition. The invention further relates to a process of making the novel polymer. |
申请公布号 |
US2013330668(A1) |
申请公布日期 |
2013.12.12 |
申请号 |
US201213492125 |
申请日期 |
2012.06.08 |
申请人 |
WU HENGPENG;POLISHCHUK OREST;CAO YI;HONG SUNGEUN;YIN JIAN;LIN GUANYANG;PAUNESCU MARGARETA;NEISSER MARK;AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. |
发明人 |
WU HENGPENG;POLISHCHUK OREST;CAO YI;HONG SUNGEUN;YIN JIAN;LIN GUANYANG;PAUNESCU MARGARETA;NEISSER MARK |
分类号 |
C08F220/10;C07C245/04;G03F7/004;G03F7/20 |
主分类号 |
C08F220/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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