发明名称 SEMICONDUCTOR DEVICE
摘要 Semiconductor device comprises a memory cell region, a peripheral region, and first wiring. The memory cell region includes a first isolation region, and a first active region provided so as to be divided off by the first isolation region. The peripheral region includes a second isolation region, and a second active region divided off by the first and second isolation regions and protruding from the upper surface of an insulating film located in the first and second isolation regions. The first wiring is buried in portions of a semiconductor substrate within the memory cell region and the peripheral region, so as to extend over the first and second active regions in a first direction. The first-direction width of the second active region is constant.
申请公布号 US2013328160(A1) 申请公布日期 2013.12.12
申请号 US201313897739 申请日期 2013.05.20
申请人 ELPIDA MEMORY, INC. 发明人 OTA YOHEI
分类号 H01L27/04 主分类号 H01L27/04
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