发明名称 THIN PLATE MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a thin plate manufacturing apparatus that is small and whose maintainability is excellent.SOLUTION: In a thin plate manufacturing apparatus 10, a backing board 21 is immersed in a material melt 42 and is took out therefrom, allowing a thin plate to be formed on the surface 22 of the backing board 21. The thin plate manufacturing apparatus 10 includes: a chamber 31; a crucible 41 that is disposed in the chamber 31 and stores the material melt 42; an arm member 61 that is rotatably provided about a rotation axis 102 extending in a horizontal direction; and a rotating member 50 that has a holding table 51 for holding the backing board 21, is rotatably provided about a rotation axis 101 extending in a horizontal direction, and is coupled to the arm member 61 on the axis of the rotation axis 101. The arm member 61 is disposed outside the chamber 31.
申请公布号 JP2013256412(A) 申请公布日期 2013.12.26
申请号 JP20120133699 申请日期 2012.06.13
申请人 SHARP CORP 发明人
分类号 C30B29/06;C01B33/02;C30B19/06;H01L21/208;H01L31/04 主分类号 C30B29/06
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