图案形成材料、及图案形成装置、以及图案形成方法,申请号TW095112640-传众专利搜索

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发明名称	图案形成材料、及图案形成装置、以及图案形成方法
摘要
申请公布号	TWI421639	申请公布日期	2014.01.01
申请号	TW095112640	申请日期	2006.04.10
申请人	旭化成电子材料股份有限公司日本	发明人	佐藤守正;南一守
分类号	G03F7/085;G03F7/027;G03F7/20;H01L21/027	主分类号	G03F7/085
代理机构		代理人	何金涂台北市大安区敦化南路2段77号8楼;丁国隆台北市大安区敦化南路2段77号8楼
主权项
地址	日本

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