曝光机台及应用其之曝光方法,申请号TW099109144-传众专利搜索

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发明名称	曝光机台及应用其之曝光方法
摘要
申请公布号	TWI421646	申请公布日期	2014.01.01
申请号	TW099109144	申请日期	2010.03.26
申请人	友达光电股份有限公司新竹市新竹科学工业园区力行二路1号	发明人	许咏政;温孟川;王炯翰
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人	蔡坤财台北市中山区松江路148号11楼;李世章台北市中山区松江路148号11楼
主权项
地址	新竹市新竹科学工业园区力行二路1号

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