用于清洗抗蚀剂脱膜剂的化学清洗组成物,申请号TW096110228-传众专利搜索

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发明名称	用于清洗抗蚀剂脱膜剂的化学清洗组成物
摘要
申请公布号	TWI421650	申请公布日期	2014.01.01
申请号	TW096110228	申请日期	2007.03.23
申请人	东进世美肯股份有限公司南韩	发明人	金圣培;朴熙珍;尹锡壹;金柄郁;辛成健
分类号	G03F7/42	主分类号	G03F7/42
代理机构		代理人	刘绪伦台中市南屯区永春东一路549号3楼
主权项
地址	南韩

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