发明名称 |
OPTICAL METHOD AND SYSTEM FOR DETECTING DEFECTS IN THREE-DIMENSIONAL STRUCTURES |
摘要 |
A method and system are presented for use in inspection of via containing structures. According to this technique, measured data indicative of a spectral response of a via-containing region of a structure under measurements is processed, and, upon identifying a change in at least one parameter of the spectral response with respect to a spectral signature of the via-containing region, output data is generated indicative of a possible defect at an inner surface of the via. |
申请公布号 |
WO2014006614(A1) |
申请公布日期 |
2014.01.09 |
申请号 |
WO2013IL50560 |
申请日期 |
2013.07.02 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD. |
发明人 |
BARAK, GILAD;DOTAN, ELAD;BELLELI, ALON |
分类号 |
G01N21/00;G01N22/00;H01L21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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