| 摘要 |
A method of storing an evaluation result includes the steps of: changing a first physical value related to a transistor constituting a semiconductor integrated circuit; changing a second physical value; measuring a deterioration value of reliability of the transistor with time according to the first physical value and the second physical value through a reliability evaluation; dividing the deterioration value into a plurality of continuous regions with a value of a predetermined range from a minimum deterioration value to a maximum deterioration value to obtain divided deterioration values; dividing the first physical value into a plurality of continuous regions with a value of a predetermined range; dividing the second physical value into a plurality of continuous regions with a value of a predetermined range; and storing the divided deterioration values in a storage unit according to the continuous regions of the first physical value and the second physical value. |
