发明名称 |
PROBE CARD AND INSPECTION DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe card that realizes effective arrangement of electronic components.SOLUTION: A probe card relating to the invention comprises: multiple probes 31 that are in contact with multiple electrodes 51 of a device 50; a probe substrate 30 that is provided with the multiple probes 31; a wiring substrate 10 that is arranged in the form of facing a surface opposite to a surface where the probes 31 of the probe substrate 30 are provided; a connection body 20 that has a connection pin 21 for electrically connecting the wiring of the probe substrate 30 to the wiring of the wiring substrate 10, and also includes a holder 22 for holding the connection pin 21 between the probe substrate 30 and the wiring substrate 10; and a first electronic component that is mounted on a surface of the wiring substrate 10 on a side of the probe substrate 30 and is arranged in a mounting space 23 formed by a through hole or a recessed part provided at the holder 22. |
申请公布号 |
JP2014025761(A) |
申请公布日期 |
2014.02.06 |
申请号 |
JP20120165041 |
申请日期 |
2012.07.25 |
申请人 |
MICRONICS JAPAN CO LTD |
发明人 |
MIKUNI KATSUSHI;KIKUCHI YOSHINORI;ONUMA YOSHITO;KUDO TOSHIYUKI |
分类号 |
G01R1/073;G01R1/067;G01R31/26;G01R31/28;H01L21/66 |
主分类号 |
G01R1/073 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|