| 摘要 |
PROBLEM TO BE SOLVED: To effectively achieve alignment for correcting positional deviation of a suction head.SOLUTION: A spherical body mounting apparatus comprises: a suction head 2; a first support part 5 for supporting a substrate 400 at a mounting position P1; a second support part 6 for supporting a mask 3 at a supply position P2; a moving mechanism 7 for moving the suction head 2; a control unit; and an alignment mechanism for positioning the suction head 2 to be aligned with the substrate 400 and the mask 3. The suction head 2 comprises a protrusion arranged on a suction face, and the movement mechanism 7 has an imaging part 8 mounted thereto. The control unit controls the imaging part 8 to take an image of a dent on a sheet body formed by the protrusion when the suction head 2 is moved to the mounting position P1 in a state where the sheet body is supported by the first support part 5, and specifies amount of the positional deviation of a mounting position of the suction head 2 mounted to the movement mechanism 7, on the basis of the imaging result of the dent, and controls the alignment mechanism to perform positioning on the basis of the amount of positional deviation. |
