| 摘要 |
A molecular pump (1A) is provided with a pump body (2) having a turbo molecular pump part (2a), a control unit (4) having a control part and a power part, and a cooling unit (3) for cooling the pump body (2) and the control unit (4). At a first position that is within the control unit (4) and the temperature of which becomes low, a first temperature detection part (90) is provided. At a second position that is within the control unit (4) and the temperature of which becomes high, a second temperature detection part (80) doubling as a humidity detection part is provided. The control part controls operation of the cooling unit (3) on the basis of the relative humidity, at the first position, calculated on the basis of temperature information and humidity information detected by the first temperature detection part (90) and the second temperature detection part (80) doubling as a humidity detection part. |
