| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an anode material for electroplating capable of improving, by virtue of a more uniform homogenization of the phosphorus distribution within the material, the yield when used for the electrolytic copper plating.SOLUTION: The provided method for manufacturing an anode material for electroplating comprises (a) a step of manufacturing a phosphorus-containing copper metal having, in terms of mass%, a phosphorus content higher than 0 and lower than 0.1 by forming the same via cooling solidification from liquid to solid phases; (b) a quenching step of subjecting, subsequently to the (a) step, the phosphorus-containing copper metal to a homogenizing thermal treatment and of then rapidly cooling the same; and (c) a step of obtaining, after the (b) step, an anode material for electroplating by performing an additional thermomechanical treatment and then quenching once again. |
