PROBE DEVICE, SUBSTRATE INSPECTION DEVICE, AND PROBE STRAIGHTENING METHOD

摘要

PROBLEM TO BE SOLVED: To restore a probe deformed to a bending state, into an initial state.SOLUTION: A probe device includes: a probe unit 2 which includes a plurality of probes and support parts supporting front end portions and base end portions of respective probes and is configured so that each probe has the front end portion pressed toward the base end portion more than in an initial state to have the intermediate portion bent when pressing a substrate 500 with the front end portion and is restored to the initial state due to elastic force of the intermediate portion when releasing the pressing state; and a probe straightening part which restores each probe deformed to a bending state into the initial state. Each probe is formed so that the front end portion includes a ferromagnetic body, and the probe straightening part includes a magnet unit 8 for generating a magnetic field and a moving mechanism 3 for moving the probe unit 2 so as to bring the magnet unit 8 and the front end portion of the probe close to each other in a lengthwise direction of the probe, and a magnetic force of the magnetic field is caused to act between the magnet unit 8 and the front end portion of the probe brought close to each other, in such a direction that bend of the intermediate portion is reduced.