| 摘要 |
The device comprises at least two coaxial wave guides (4), each consisting of a central conductor (1) and an external conductor (2) to supply microwaves to a treatment chamber, characterised in that at least the two electromagnetic wave injection guides (4) are combined with a magnetic circuit (21-22) extended in one direction, said magnetic circuit surrounding the wave guides (4), creating a magnetic field capable of creating an ECR condition near said wave guides. |
