发明名称 Hierarchical Carbon Nano and Micro Structures
摘要 Disclosed are methods for fabricating pyrolysed carbon nanostructures. An example method includes providing a substrate, depositing a polymeric material, subjecting the polymeric material to a plasma etching process to form polymeric nanostructures, and pyrolysing the polymeric nanostructures to form carbon nanostructures. The polymeric material comprises either compounds with different plasma etch rates or compounds that can mask a plasma etching process. The plasma etching process may be an oxygen plasma etching process.
申请公布号 US2014079921(A1) 申请公布日期 2014.03.20
申请号 US201214114819 申请日期 2012.05.03
申请人 KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D;IMEC 发明人 DE VOLDER MICHAEL
分类号 C01B31/02;C01B31/00 主分类号 C01B31/02
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