| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow controller capable of making a flow rate of actually flowing liquid satisfy the desired over shoot amount, target response time, or the like, regardless of preconditions such as, magnitude of a final target value at an input setting flow rate, and the like.SOLUTION: The flow controller includes: a setting flow rate arrangement part 41 for, when accepting an input setting flow rate whose target value has discontinuous points discontinuously varying with time from a first target value rto a second target value r, outputting a setting flow rate after arrangement obtained by inserting continuous change sections between the discontinuous points in the input setting flow rate; and a valve control part 42 for controlling the degree of opening of a flow rate control valve 2 so that the deviation between the setting flow rate after arrangement and a measured flow rate is reduced. The setting flow rate arrangement part 41 changes the change amount of the target value per unit time in the continuous change section, according to magnitude of an absolute value of the deviation between the first target value rand the second target value rof the accepted input setting flow rate. |
