| 摘要 |
PROBLEM TO BE SOLVED: To effectively restrain heat generated in a turbo molecular pump from being transferred to an external device connected to an inlet flange.SOLUTION: In a turbo molecular pump, a plurality of rotor blades that rotate integrally with a rotor shaft and a plurality of stator blades interposed between the plurality of rotor blades are housed in a nearly cylindrical casing, and air is evacuated to an outlet from an external device connected to an inlet flange provided at one end of the casing. An outer peripheral portion of the casing near the inlet flange is provided with an annular cooling passage coaxial with the nearly cylindrical casing for passing a cooling medium. |
