| 摘要 |
PROBLEM TO BE SOLVED: To provide an Fe-Co-based alloy target material which can obtain strong magnetic flux leakage, and has low permeability and high using efficiency, and to provide a method for producing the same. SOLUTION: Disclosed is an Fe-Co-based alloy sputtering target material in which compositional formula in atomic ratio is expressed by (Fe<SB>X</SB>-Co<SB>100-X</SB>)<SB>100-Y</SB>M<SB>Y</SB>; wherein 20≤X≤80 and 4≤Y≤25 are satisfied, and the M element denotes Nb and/or Ta. The microstructure of the sputtering target material includes a metallic structure composed of an intermetallic compound phase comprising a BCC phase and/or an FCC phase essentially consisting of Fe and Co and the M element, and in which the diameter of the maximum inscribed circle drawn on the intermetallic compound phase comprising the M element in the microstructure is≤10μm. COPYRIGHT: (C)2010,JPO&INPIT |
