| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system that can improve the efficiency of processing substrates. SOLUTION: A load lock module 13 of a substrate processing system 10 has an upper substrate feed mechanism 22 and a lower substrate feed mechanism 23 vertically movable independently of each other inside the load lock module 13. The upper substrate feed mechanism 22 is so constructed that four guide arms 27 slide toward a process chamber 11 relative to four guide rails 25 disposed on a vertically movable base 26, and that four picks 28 slide toward the process chamber 11 relative to the respective guide arms 27. The lower substrate feed mechanism 23 is so constructed that four guide arms 31 slide toward the process chamber 11 relative to four guide rails 29 disposed on a vertically movable base 30, and that four picks 32 slide toward the process chamber 11 relative to the respective guide arms 31. COPYRIGHT: (C)2012,JPO&INPIT |
