发明名称 |
HIGH SPEED LASER SCANNING SYSTEM FOR SILICON SOLAR CELL FABRICATION |
摘要 |
<p>A laser scanning apparatus that uses a polygonal mirror and a beam shaper for laser drilling of holes in one or more layers during solar cell fabrication is provided. The apparatus may be used to laser drill holes in a back side passivation layer of a solar cell during back electrical contact formation. The apparatus includes the use of a polygonal mirror to improve the speed of the back electrical formation of a solar cell. The apparatus may also include the use of a beam shaper to tune the profile of the beam to prevent damage to the underlying solar cell substrate during laser drilling operations. A laser scanning module is provided which controls the speed and timing of linear movement of substrates and the operation of the laser scanning apparatus in a closed loop manner for laser drilling of material layers disposed on the substrates.</p> |
申请公布号 |
KR20140052021(A) |
申请公布日期 |
2014.05.02 |
申请号 |
KR20147006377 |
申请日期 |
2012.08.20 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GEE JAMES M.;FRANKLIN JEFFREY L. |
分类号 |
H01L31/18;H01L31/042;H01L31/054 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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