发明名称 METHOD FOR MENUFACTURING A SEMICONDUCTOR DEVICE
摘要 <p>The present invention proposes a method of easily manufacturing a semiconductor device which prevents disconnection or the difference of the layer thickness of a source electrode or a drain electrode. The present invention includes a semiconductor layer which is formed on an insulating substrate, a first insulating layer which is formed on the semiconductor layer, a gate electrode which is formed on the first insulating layer, a second insulating layer which is formed on the gate electrode, an opening part which reaches the semiconductor layer which is formed on at least the first insulating layer and the second insulating layer, and a step difference which is formed in the lateral surface of the second insulating layer in the opening part.</p>
申请公布号 KR20140051882(A) 申请公布日期 2014.05.02
申请号 KR20140041294 申请日期 2014.04.07
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 SASAGAWA SHINYA
分类号 H01L29/786 主分类号 H01L29/786
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