| 摘要 |
The present invention provides a vacuum valve capable of generating high-speed high-capacity vacuum pulses which enables a blocking/opening port of a vale; reduces noise; and improves operation efficiency by rapidly and completely forming and releasing a vacuum condition via high-speed operation. A vacuum valve according to one desirable embodiment of the present invention includes a body which includes at least one always-open intake port and at least one opening/closing port and which is closed except the opening/closing port and the always-open intake port; a seesaw type opening/closing device which is formed inside an air passage connecting the always-open intake port and the opening/closing port and which moves like a seesaw; a supporting unit which supports the seesaw type opening/closing device to be moved like a seesaw inside the body; a spring member which elastically press-supports one end of the seesaw type opening/closing device and closes one opening/closing port and open the other opening/closing port; and an opening/closing device operating device which is installed on the body and opens one opening/closing port and closes the other opening/closing port by operating the seesaw type opening/closing device. |
