发明名称 |
DEVICE FOR MANUFACTURING SEMICONDUCTOR OR METALLIC OXIDE INGOT |
摘要 |
Provided is an apparatus for manufacturing a semiconductor or metal oxide ingot by sequentially inducing a liquid-to-solid phase transition of a liquid raw material following a solidification direction, the apparatus including: a crucible containing a semiconductor or metal oxide raw material; a cooling unit spaced apart from the crucible at a predetermined distance in a vertical direction, when a height direction of the crucible is designated by the vertical direction and a direction perpendicular to the vertical direction is designated by a horizontal direction; a first heating unit spaced apart from the crucible at a predetermined distance in the horizontal direction and surrounding a circumferential surface of the crucible; and an insulating member provided between the crucible and the cooling unit in the horizontal direction, a position of the insulating member being shifted by a shifting unit. |
申请公布号 |
US2014150717(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
US201214239227 |
申请日期 |
2012.08.17 |
申请人 |
Moon Sang Jin;So Won Wook;Park Dong Soon;Koo Myung Hoi |
发明人 |
Moon Sang Jin;So Won Wook;Park Dong Soon;Koo Myung Hoi |
分类号 |
C30B11/00;B29C39/44;B29C39/38 |
主分类号 |
C30B11/00 |
代理机构 |
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代理人 |
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主权项 |
1. An apparatus for manufacturing a semiconductor or metal oxide ingot by sequentially inducing a liquid-to-solid phase transition of a liquid raw material following a solidification direction, the apparatus comprising:
a crucible containing a semiconductor or metal oxide raw material; a cooling unit spaced apart from the crucible at a predetermined distance in a vertical direction, when a height direction of the crucible is designated by the vertical direction and a direction perpendicular to the vertical direction is designated by a horizontal direction; a first heating unit spaced apart from the crucible at a predetermined distance in the horizontal direction and surrounding a circumferential surface of the crucible; and an insulating member provided between the crucible and the cooling unit in the horizontal direction, a position of the insulating member being shifted by a shifting unit.
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地址 |
Daejeon KR |