| 发明名称 |
CORRECTION APPARATUS, PROBE APPARATUS, AND TEST APPARATUS |
| 摘要 |
In order to decrease the time needed to correct misalignment when holding an object with positional accuracy and transport the object, provided is a correction apparatus that corrects misalignment of a transported object at a transport destination, comprising a first sensor that is secured to a transporting section transporting the object; and a correction control section that detects a first offset between the transporting section and the first sensor, while the object transported to the transport destination is positioned at the transport destination, by using the first sensor to detect a position of a first reference point provided to correspond to a target position at the transport destination. Also provided is a probe apparatus and a test apparatus. |
| 申请公布号 |
US2014160270(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201314059422 |
申请日期 |
2013.10.21 |
| 申请人 |
Advantest Corporation |
发明人 |
NAITO Takashi;HAYAKAWA Atsushi |
| 分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A correction apparatus that corrects misalignment of a transported object at a transport destination, comprising:
a first sensor that is secured to a transporting section transporting the object; and a correction control section that detects a first offset between the transporting section and the first sensor, while the object transported to the transport destination is positioned at the transport destination, by using the first sensor to detect a position of a first reference point provided to correspond to a target position at the transport destination.
|
| 地址 |
Tokyo JP |
