SEMICONDUCTOR DEVICE

摘要

A well potential supply region is provided in an N-type well region of a cell array. Adjacent gates disposed in both sides of the well potential supply region in the horizontal direction and adjacent gates disposed in further both sides thereof are disposed at the same pitch. In addition, an adjacent cell array includes four gates each of which is opposed to the adjacent gates in the vertical direction. In other words, regularity in the shape of the gate patterns in the periphery of the well potential supply region is maintained.

主权项

1. A semiconductor device comprising:
a plurality of cell arrays arranged sequentially in a first direction, each of the plurality of cell arrays including a plurality of gates extending in the first direction and arranged in a second direction orthogonal to the first direction, wherein each of the plurality of cell arrays includes a first conductive type well region extending in the second direction and formed below the plurality of gates, wherein a first cell array of the plurality of cell arrays includes:
a first well potential supply region in the first conductive type well region, the first well potential supply region including impurities of same conductive type as the first conductive type well region,first, second and third adjacent gates of the plurality of gates, wherein a portion of the first well potential supply region is disposed between the first adjacent gate and the second adjacent gate, and the third adjacent gate is disposed adjacent to the first adjacent gate,the first, second and third adjacent gates are disposed at the same pitch in the second direction, wherein a second cell array of the plurality of cell arrays adjacent to the first cell array in the first direction includes three gates of the plurality of gates, each of the three gates is opposed to at least one of the first, second and third adjacent gates of the first cell array in the first direction, and wherein the first, second, and third adjacent gates of the first cell array are dummy gates, and the first adjacent gate overlaps a portion of the first well potential supply region.