TEST SCHEDULE CREATION METHOD, TESTING METHOD, TEST SCHEDULE CREATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a test schedule creation method capable of efficiently performing a test for measuring a temperature of treatment by a heat treatment plate, a testing method, a test schedule creation device and a substrate processing device.SOLUTION: The test schedule creation method is configured to create test schedule information relating to a schedule of a plurality of tests before performing the plurality of tests for measuring a temperature of treatment by a heat treatment plate while changing at least any one of the heat treatment plate and a test temperature that is a target value of the treatment temperature. The test schedule creation method includes a first test creation step (steps S12 and S13) of allocating a "first order" that is a first turn, to any one of tests, and a second and subsequent test creation step (steps S14 and S15) of allocating a "second order" and an order subsequent to the "second order" to any of non-allocated tests to which the turns have not been allocated yet, and creates the test schedule information by repeating the second and subsequent test creation step (steps S14 and S15) until the turns are allocated to all the tests.