发明名称 METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic device having more favorable characteristics, by which an organic thin film can be formed for a short time while minimizing damages to a substrate, an electrode and a functional layer, and a method for producing a thin film used for the electronic device.SOLUTION: A method for manufacturing an electronic device that includes two or more electrodes and an organic thin film provided between the two or more electrodes includes the steps of: applying a coating liquid containing a material having a cross-linking group to form a coating film; and repeatedly irradiating the coating film with an electromagnetic wave in an atmosphere having an oxygen concentration lower than that in atmospheric air to crosslink the cross-linking group and thereby forming the organic thin film.
申请公布号 JP2014235811(A) 申请公布日期 2014.12.15
申请号 JP20130115182 申请日期 2013.05.31
申请人 SUMITOMO CHEMICAL CO LTD 发明人 SASA SHUICHI
分类号 H05B33/10;H01L21/336;H01L29/786;H01L51/05;H01L51/40;H01L51/42;H01L51/50;H05B33/02 主分类号 H05B33/10
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