Lateral PNP bipolar transistor formed with multiple epitaxial layers

摘要

A lateral bipolar transistor with deep emitter and deep collector regions is formed using multiple epitaxial layers of the same conductivity type. Deep emitter and deep collector regions are formed without the use of trenches. Vertically aligned diffusion regions are formed in each epitaxial layer so that the diffusion regions merged into a contiguous diffusion region after annealing to function as emitter or collector or isolation structures. In another embodiment, a lateral trench PNP bipolar transistor is formed using trench emitter and trench collector regions. In yet another embodiment, a lateral PNP bipolar transistor with a merged LDMOS transistor is formed to achieve high performance.

主权项

1. A lateral bipolar transistor, comprising:
a semiconductor substrate of a first conductivity type; a first buried layer of the first conductivity type and a second buried layer of a second conductivity type both formed on the substrate, the second conductivity type being opposite the first conductivity type; one or more epitaxial layers of the second conductivity type formed successively on the substrate, each epitaxial layer including two or more buried layers of the first conductivity type formed therein and positioned above and separated from the second buried layer, the buried layers formed in one epitaxial layer being in vertical alignment with the buried layers formed in an adjacent epitaxial layer; and a last epitaxial layer of the second conductivity type formed on the last one of the one or more epitaxial layers, the last epitaxial layer having at least first and second diffusion regions of the first conductivity type formed therein, each of the first and second diffusion regions being in vertical alignment with a respective one of the buried layers formed in the last one of the one or more epitaxial layers, wherein the first diffusion region and a first set of the buried layers formed in the one or more epitaxial layers are in vertical alignment to form a contiguous diffusion region of the first conductivity type and functions as an emitter region, and the second diffusion region and a second set of the buried layers formed in the one or more epitaxial layers are in vertical alignment to form a contiguous diffusion region of the first conductivity type and functions as a collector region, a base region being formed in the one or more epitaxial layers and the last epitaxial layer between the emitter and collector regions.