Acoustic resonator formed on a pedestal

摘要

An acoustic resonator structure comprises a substrate having a trench, a conductive pattern formed in the trench, a pillar formed within the trench, and an acoustic resonator supported at a central location by the pillar and suspended over the trench.

主权项

1. An acoustic resonator structure, comprising:
a substrate comprising a trench; a conductive pattern disposed in the trench; a pillar disposed within the trench; and an acoustic resonator supported by the pillar and suspended over the trench, the acoustic resonator comprising: a lower electrode electrically connected to a first part of the conductive pattern; an upper electrode connected to a second part of the conductive pattern through a via located above the pillar; and a piezoelectric layer located between the lower electrode and the upper electrode.