TRANSMISSION ELECTRON DIFFRACTION MEASUREMENT APPARATUS AND METHOD FOR MEASURING TRANSMISSION ELECTRON DIFFRACTION PATTERN

摘要

Provided is a transmission electron diffraction measurement apparatus including an electron gun; a first optical system under the electron gun; a sample chamber under the first optical system; a second optical system under the sample chamber; an observation chamber under the second optical system; a region that emits light by receiving energy from an electron in the observation chamber; and a camera facing the region.

主权项

1. A measurement apparatus comprising:
an electron gun configured to irradiate a sample with an electron; a chamber configured to hold the sample and a fluorescent plate capable of emitting light by being irradiated with an electron; and a camera capable of taking a moving image of a pattern appearing on the fluorescent plate.