发明名称 |
SEPARATION ORIGIN PRODUCTION DEVICE AND METHOD |
摘要 |
<p>The present invention provides a separation origin production device capable of detecting the position of a blade edge of a knife relative to a knife insertion position without tilting the knife, allowing the knife to be inserted precisely. The present invention provides a separation origin production device provided with a movement means for inserting a knife between a first substrate and a second substrate of a layered body, a position detection means for detecting the position of a blade edge of the knife and the position of a second main surface of the second substrate, and a position adjustment means for adjusting the positions of the layered body and the knife.</p> |
申请公布号 |
WO2015002030(A1) |
申请公布日期 |
2015.01.08 |
申请号 |
WO2014JP66714 |
申请日期 |
2014.06.24 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
TAKIUCHI KEI;ITO YASUNORI;UTSUGI HIROSHI |
分类号 |
H01L21/02;B23Q17/24;G01B11/00;G02F1/13 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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