发明名称 SEPARATION ORIGIN PRODUCTION DEVICE AND METHOD
摘要 <p>The present invention provides a separation origin production device capable of detecting the position of a blade edge of a knife relative to a knife insertion position without tilting the knife, allowing the knife to be inserted precisely. The present invention provides a separation origin production device provided with a movement means for inserting a knife between a first substrate and a second substrate of a layered body, a position detection means for detecting the position of a blade edge of the knife and the position of a second main surface of the second substrate, and a position adjustment means for adjusting the positions of the layered body and the knife.</p>
申请公布号 WO2015002030(A1) 申请公布日期 2015.01.08
申请号 WO2014JP66714 申请日期 2014.06.24
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 TAKIUCHI KEI;ITO YASUNORI;UTSUGI HIROSHI
分类号 H01L21/02;B23Q17/24;G01B11/00;G02F1/13 主分类号 H01L21/02
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